Growth | CZ, MCZ, FZ |
Grade | Prime, Test, Dummy, etc. |
Diameter
| Other diameters,such as 10mm,12.7mm,1.5″,35mm,40mm,2.5″ are also possible |
Thickness
| 50~3000um |
Finish
| As cut, lapped, etched,SSP,DSP, etc |
Orientation
| (100) (111)(110) (211)(311) (511)(531) etc |
Off cut
| Up to 4 deg |
Type/Dopant
| P/B, N/Phos, N/As, N/Sb, Intrinsic |
Resistivity
| FZ : Up to 20k ohm-cm |
| CZ/MCZ : From 0.001 to 150 ohm-cm |
Thin films
| * PVD: Al, Cu, Au, Cr, Si, Ni, Fe, Mo,etc |
| * PECVD: Oxide, Nitride, SiC,etc |
| * Silicon epitaxial wafers and epitaxial services(SOS, GaN, GOI etc). |
Processes
| DSP, ultra thin, ultra flat, etc. |
| Downsizing, back grinding, dicing , etc. |
| MEMS |
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