Standard Dimensions and Tolerances for 150mm Diameter GaAs Wafer
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Property | Dimension | Tolerance | Units |
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Diameter | 150 | +/-0.5 | mm |
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Thickness,Center Point |
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Option A | 675 | +/-25 | μm |
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Option B | 550 | +/-25 | μm |
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Notch Orientation | [010] | +/-2 | degrees |
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Notch Depth | 1 | +0.25/-0.0 | mm |
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Standard Dimensions and Tolerances for 100mm Diameter GaAs Wafer
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Property | Dimension | Tolerance | Units |
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Diameter | 100 | +/-0.5 | mm |
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Thickness,Center Point | 675 | +/-25 | μm |
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Primary Flat Lenght | 18 | +/-2 | mm |
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Secondary Flat Lenght | 18 | +/-2 | mm |
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US/SEMI and E/J-Flat-Option available |
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Standard Dimensions and Tolerances for 200mm Diameter GaAs Wafer
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Property | Dimension | Tolerance | Units |
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Diameter | 200 | +/-0.5 | mm |
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Thickness,Center Point | 625 | +/-25 | μm |
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Notch Orientation | [010] | +/-2 | degrees |
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Notch Depth | 1 | +0.25/-0.0 | mm |
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Standard Dimensions and Tolerances for 3inch Diameter GaAs Wafer
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Property | Dimension | Tolerance | Units |
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Diameter | 76.2 | +/-0.5 | mm |
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Thickness,Center Point | 625 | +/-25 | μm |
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Primary Flat Lenght | 22 | +/-2 | mm |
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Secondary Flat Lenght | 11 | +/-2 | mm |
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US/SEMI and E/J-Flat-Option available |
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